Monolithic integration of DUV-induced waveguides into plastic microfluidic chip for optical manipulation: Nano Fabrication 2013

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Veröffentlicht in:	Microelectronic engineering 2014, Vol.121, p.5-9
Hauptverfasser:	KHOURY, M, VANNAHME, C, SØRENSEN, K. T, KRISTENSEN, A, BERG-SØRENSEN, K
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied fluid mechanics Applied sciences Cross-disciplinary physics: materials science rheology Design. Technologies. Operation analysis. Testing Electronics Exact sciences and technology Fluid dynamics Fluidics Fundamental areas of phenomenology (including applications) Integrated circuits Materials science Methods of nanofabrication Microelectronic fabrication (materials and surfaces technology) Nanoscale pattern formation Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ISSN:	0167-9317 1873-5568