Influence of Al2O3 layer thickness on high―temperature stability of TiAIN/Al2O3 multilayers

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Veröffentlicht in:	Applied surface science 2013, Vol.285, p.287-292
Hauptverfasser:	GAO, C. K, YAN, J. Y, DONG, L, LI, D. J
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Physics
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container_end_page	292
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container_start_page	287
container_title	Applied surface science
container_volume	285
creator	GAO, C. K YAN, J. Y DONG, L LI, D. J
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format	Article
fullrecord	<record><control><sourceid>pascalfrancis</sourceid><recordid>TN_cdi_pascalfrancis_primary_28040441</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>28040441</sourcerecordid><originalsourceid>FETCH-pascalfrancis_primary_280404413</originalsourceid><addsrcrecordid>eNqNjLsOgjAYRhujiXh5hy6OxNIWxZEYjSy6sBpSSZFqKaR_Gdh8CV_QJ_H6AE7fcM75esgLoiXzwzDifeSRYLHyOWN0iEYAF0IC-qIeOiam0K00ucR1gWNNDwxr0UmLXanyq5EAuDa4VOfycbs7WTXSCtdaicGJk9LKde8wVXGyn3_zqtVOfT5gggaF0CCnvx2j2XaTrnd-IyAXurDC5AqyxqpK2C6jEeGE84D96z0BWw1HHA</addsrcrecordid><sourcetype>Index Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Influence of Al2O3 layer thickness on high―temperature stability of TiAIN/Al2O3 multilayers</title><source>Elsevier ScienceDirect Journals</source><creator>GAO, C. K ; YAN, J. Y ; DONG, L ; LI, D. J</creator><creatorcontrib>GAO, C. K ; YAN, J. Y ; DONG, L ; LI, D. J</creatorcontrib><identifier>ISSN: 0169-4332</identifier><identifier>EISSN: 1873-5584</identifier><language>eng</language><publisher>Amsterdam: Elsevier</publisher><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties ; Condensed matter: structure, mechanical and thermal properties ; Cross-disciplinary physics: materials science; rheology ; Exact sciences and technology ; Physics</subject><ispartof>Applied surface science, 2013, Vol.285, p.287-292</ispartof><rights>2015 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,4010</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=28040441$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>GAO, C. K</creatorcontrib><creatorcontrib>YAN, J. Y</creatorcontrib><creatorcontrib>DONG, L</creatorcontrib><creatorcontrib>LI, D. J</creatorcontrib><title>Influence of Al2O3 layer thickness on high―temperature stability of TiAIN/Al2O3 multilayers</title><title>Applied surface science</title><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties</subject><subject>Condensed matter: structure, mechanical and thermal properties</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Exact sciences and technology</subject><subject>Physics</subject><issn>0169-4332</issn><issn>1873-5584</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2013</creationdate><recordtype>article</recordtype><recordid>eNqNjLsOgjAYRhujiXh5hy6OxNIWxZEYjSy6sBpSSZFqKaR_Gdh8CV_QJ_H6AE7fcM75esgLoiXzwzDifeSRYLHyOWN0iEYAF0IC-qIeOiam0K00ucR1gWNNDwxr0UmLXanyq5EAuDa4VOfycbs7WTXSCtdaicGJk9LKde8wVXGyn3_zqtVOfT5gggaF0CCnvx2j2XaTrnd-IyAXurDC5AqyxqpK2C6jEeGE84D96z0BWw1HHA</recordid><startdate>2013</startdate><enddate>2013</enddate><creator>GAO, C. K</creator><creator>YAN, J. Y</creator><creator>DONG, L</creator><creator>LI, D. J</creator><general>Elsevier</general><scope>IQODW</scope></search><sort><creationdate>2013</creationdate><title>Influence of Al2O3 layer thickness on high―temperature stability of TiAIN/Al2O3 multilayers</title><author>GAO, C. K ; YAN, J. Y ; DONG, L ; LI, D. J</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-pascalfrancis_primary_280404413</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2013</creationdate><topic>Condensed matter: electronic structure, electrical, magnetic, and optical properties</topic><topic>Condensed matter: structure, mechanical and thermal properties</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Exact sciences and technology</topic><topic>Physics</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>GAO, C. K</creatorcontrib><creatorcontrib>YAN, J. Y</creatorcontrib><creatorcontrib>DONG, L</creatorcontrib><creatorcontrib>LI, D. J</creatorcontrib><collection>Pascal-Francis</collection><jtitle>Applied surface science</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>GAO, C. K</au><au>YAN, J. Y</au><au>DONG, L</au><au>LI, D. J</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Influence of Al2O3 layer thickness on high―temperature stability of TiAIN/Al2O3 multilayers</atitle><jtitle>Applied surface science</jtitle><date>2013</date><risdate>2013</risdate><volume>285</volume><spage>287</spage><epage>292</epage><pages>287-292</pages><issn>0169-4332</issn><eissn>1873-5584</eissn><cop>Amsterdam</cop><pub>Elsevier</pub></addata></record>
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issn	0169-4332 1873-5584
language	eng
recordid	cdi_pascalfrancis_primary_28040441
source	Elsevier ScienceDirect Journals
subjects	Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Physics
title	Influence of Al2O3 layer thickness on high―temperature stability of TiAIN/Al2O3 multilayers
url	https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-21T01%3A52%3A47IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-pascalfrancis&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Influence%20of%20Al2O3%20layer%20thickness%20on%20high%E2%80%95temperature%20stability%20of%20TiAIN/Al2O3%20multilayers&rft.jtitle=Applied%20surface%20science&rft.au=GAO,%20C.%20K&rft.date=2013&rft.volume=285&rft.spage=287&rft.epage=292&rft.pages=287-292&rft.issn=0169-4332&rft.eissn=1873-5584&rft_id=info:doi/&rft_dat=%3Cpascalfrancis%3E28040441%3C/pascalfrancis%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true