Highly Selective Dry Etching of Germanium over Germanium-Tin (Ge1―xSnx): A Novel Route for Ge1―xSnx Nanostructure Fabrication

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Veröffentlicht in:	Nano letters 2013-08, Vol.13 (8), p.3783-3790
Hauptverfasser:	GUPTA, Suyog, CHEN, Robert, HUANG, Yi-Chiau, KIM, Yihwan, SANCHEZ, Errol, HARRIS, James S, SARASWAT, Krishna C
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical synthesis methods Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Electron states and collective excitations in thin films, multilayers, quantum wells, mesoscopic and nanoscale systems Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Exact sciences and technology Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties Materials science Methods of nanofabrication Physics Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
Online-Zugang:	Volltext
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