Bulk micromachining of SiC substrate for MEMS sensor applications : Nanofabrication 2012

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Hauptverfasser:	VANKO, Gabriel, HUDEK, Peter, ZEHETNER, Johann, DZUBA, Jaroslav, CHOLEVA, Pavlina, KUTIS, Vladimír, VALLO, Martin, RYGER, Ivan, LALINSKY, Tibor
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical instruments, equipment and techniques Micro- and nanoelectromechanical devices (mems/nems) Microelectronic fabrication (materials and surfaces technology) Micromechanical devices and systems Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Transistors
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ISSN:	0167-9317 1873-5568