Fabrication of Nb/Al2O3/Nb Josephson Junctions Using In Situ Magnetron Sputtering and Atomic Layer Deposition

Bibliographische Detailangaben

Hauptverfasser:	RONGTAO LU, ELLIOT, Alan J, YU, H. F, XUE, G. M, ZHAO, S. P, WILLE, Logan, BO MAO, SIYUAN HAN, WU, Judy Z, TALVACCHIO, John, SCHULZE, Heidi M, LEWIS, Rupert M, EWING, Daniel J
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Applied sciences Electrical engineering. Electrical power engineering Electronics Exact sciences and technology Insulators Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Superconducting devices Various equipment and components
Online-Zugang:	Volltext
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