High-Tc Superconducting High Gradient Magnetic Separator Using Solid Nitrogen Cooling System for Purification of CMP Wastewater

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Bibliographische Detailangaben
Hauptverfasser:	SONG, Jung-Bin, KWANG LOK KIM, DONGGYU YANG, KIM, Young-Gyun, JONGSEOK LEE, MIN CHUL AHN, HAIGUN LEE
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Applied sciences Design. Technologies. Operation analysis. Testing Electrical engineering. Electrical power engineering Electromagnets Electronics Exact sciences and technology General (including economical and industrial fields) Integrated circuits Microelectronic fabrication (materials and surfaces technology) Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Various equipment and components
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