Epitaxial thin films of BaSrO as gate dielectric: Insulating Films on Semiconductors 2013

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Veröffentlicht in:	Microelectronic engineering 2013, Vol.109, p.152-155
Hauptverfasser:	ISLAM, S, MÜLLER-SAJAK, D, HOFMANN, K. R, PFNÜR, H
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Compound structure devices Condensed matter: electronic structure, electrical, magnetic, and optical properties Diodes Electron states Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Electronic transport in interface structures Electronics Exact sciences and technology Metal-insulator-semiconductor structures (including semiconductor-to-insulator) Methods of electronic structure calculations Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ISSN:	0167-9317 1873-5568