A ΔΣ Interface for MEMS Accelerometers Using Electrostatic Spring Constant Modulation for Cancellation of Bondwire Capacitance Drift

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Bibliographische Detailangaben
Hauptverfasser:	LAJEVARDI, Pedram, PETKOV, Vladimir P, MURMANN, Boris
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Applied sciences Design. Technologies. Operation analysis. Testing Electronics Exact sciences and technology General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Integrated circuits Micro- and nanoelectromechanical devices (mems/nems) Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Sensors (chemical, optical, electrical, movement, gas, etc.) remote sensing
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