The intrinsic relationship between the kink-and-tail and box-shaped zinc diffusion profiles in n-GaSb

Different diffusion sources were used to study Zn diffusion in n-GaSb. We found that the Ga atoms from the diffusion sources suppressed the formation of the high-concentration surface diffusion fronts in Zn profiles, thus converting the kink-and-tail-shaped profile to the box-shaped profile. Our ana...

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Veröffentlicht in:Semiconductor science and technology 2013-01, Vol.28 (1), p.15001
Hauptverfasser: Ye, Hong, Tang, Liangliang, Li, Kuijun
Format: Artikel
Sprache:eng
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Zusammenfassung:Different diffusion sources were used to study Zn diffusion in n-GaSb. We found that the Ga atoms from the diffusion sources suppressed the formation of the high-concentration surface diffusion fronts in Zn profiles, thus converting the kink-and-tail-shaped profile to the box-shaped profile. Our analysis demonstrated that both the surface and the tail regions in the kink-and-tail profiles showed high-quality regularities. The analysis also revealed that the formation mechanism of the box profiles is the same as that of the tail region of the kink-and-tail profiles. The similarities of the photoluminescence signals between the main region of the box profiles and the tail region of the kink-and-tail profiles substantiated our findings.
ISSN:0268-1242
1361-6641
DOI:10.1088/0268-1242/28/1/015001