Novel Capacitance Coupling Complementary Dual-Direction SCR for High-Voltage ESD
A novel capacitance coupling complementary dual-direction silicon-controlled rectifier (SCR) (CCCDSCR) for high-voltage electrostatic discharge protection is proposed and verified in 0.5-μm BCD process. The trigger voltage of CCCDSCR can be adjusted by coupling capacitance to meet different protecti...
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Veröffentlicht in: | IEEE electron device letters 2012-05, Vol.33 (5), p.640-642 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | A novel capacitance coupling complementary dual-direction silicon-controlled rectifier (SCR) (CCCDSCR) for high-voltage electrostatic discharge protection is proposed and verified in 0.5-μm BCD process. The trigger voltage of CCCDSCR can be adjusted by coupling capacitance to meet different protection requirements. Compared with traditional lateral double-diffusion NMOS, LDSCR, stacked field-oxide device, and stacked low-voltage-triggering SCR devices, the CCCDSCR has appropriate low trigger voltage of 27.3 V, high holding voltage of 24.3 V, and highest figure of merit (FOM) according to our defined FOM. |
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ISSN: | 0741-3106 1558-0563 |
DOI: | 10.1109/LED.2012.2188015 |