Monolithically integrated cantilevers with self-aligned tips for wavelength tuning in a photonic crystal cavity-based channel-drop filter

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Bibliographische Detailangaben
Veröffentlicht in:	Journal of micromechanics and microengineering 2011-07, Vol.21 (7), p.074004
Hauptverfasser:	Abdulla, S M C, Kauppinen, L J, Dijkstra, M, de Boer, M J, Berenschot, E, de Ridder, R M, Krijnen, G J M
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Condensed matter: electronic structure, electrical, magnetic, and optical properties Conductivity phenomena in semiconductors and insulators Electronic transport in condensed matter Electronics Exact sciences and technology Filters, zone plates, and polarizers Fundamental areas of phenomenology (including applications) Microelectronic fabrication (materials and surfaces technology) Optical elements, devices, and systems Optical materials Optics Photonic bandgap materials Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online-Zugang:	Volltext
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