A generalized CMOS-MEMS platform for micromechanical resonators monolithically integrated with circuits

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	Journal of micromechanics and microengineering 2011-06, Vol.21 (6), p.065012
Hauptverfasser:	Chen, Wen-Chien, Fang, Weileun, Li, Sheng-Shian
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical instruments, equipment and techniques Microelectronic fabrication (materials and surfaces technology) Micromechanical devices and systems Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!