Fabrication of ordered silicon nanopillars and nanowires by self-assembly and metal-assisted etching : Porous Semiconductors - Science and Technology

Fabrication of ordered silicon nanopillars and nanowires by self-assembly and metal-assisted etching : Porous Semiconductors - Science and Technology

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Veröffentlicht in:Physica status solidi. A, Applications and materials science Applications and materials science, 2011, Vol.208 (6), p.1412-1416
Hauptverfasser: BOARINO, Luca, IMBRAGUGLIO, Dario, ENRICO, Emanuele, DE LEO, Natascia, CELEGATO, Federica, TIBERTO, Paola, PUGNO, Nicola, AMATO, Giampiero
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Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Methods of nanofabrication
Physics
Self-assembly
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container_title Physica status solidi. A, Applications and materials science
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creator BOARINO, Luca
IMBRAGUGLIO, Dario
ENRICO, Emanuele
DE LEO, Natascia
CELEGATO, Federica
TIBERTO, Paola
PUGNO, Nicola
AMATO, Giampiero
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source Wiley Journals
subjects Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Methods of nanofabrication
Physics
Self-assembly
title Fabrication of ordered silicon nanopillars and nanowires by self-assembly and metal-assisted etching : Porous Semiconductors - Science and Technology
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