One-dimensional, self-organized Si dots grown by pulsed laser melting of a-Si :H films

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Hauptverfasser:	KUNJI CHEN, GUIPENG LUO, MINGXIANG WANG, XIANG GAO, JUN XU, MU WANG, XINFAN HUANG, NAIBEN MING
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Applied sciences Cross-disciplinary physics: materials science rheology Electronics Exact sciences and technology Liquid phase epitaxy deposition from liquid phases (melts, solutions, and surface layers on liquids) Materials science Methods of deposition of films and coatings film growth and epitaxy Microelectronic fabrication (materials and surfaces technology) Microelectronics: LSI, VLSI, ULSI integrated circuit fabrication technology Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ISSN:	0022-3093 1873-4812