Effective reduction of AIN defect luminescence by fluorine implantation

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Veröffentlicht in:	Diamond and related materials 2011, Vol.20 (5-6), p.782-784
Hauptverfasser:	VETTER, Ulrich, MÜLLER, Sven, BRÖTZMANN, Marc, HOFSÄSS, Hans, GRUBER, John B
Format:	Artikel
Sprache:	eng
Schlagworte:	Cathodoluminescence, ionoluminescence Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Defects and impurities in crystals microstructure Doping and impurity implantation in other materials Exact sciences and technology Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of specific thin films Other luminescence and radiative recombination Physical radiation effects, radiation damage Physics Structure of solids and liquids crystallography
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ISSN:	0925-9635 1879-0062