Investigation of the dynamics of the Z-pinch imploding plasma for a laser-assisted discharge-produced Sn plasma EUV source
Dynamics of the imploding plasma and its relations to the 13.5 nm EUV emissions have been experimentally investigated for a laser-assisted Sn based discharge-produced plasma EUV source. The behaviours and two-dimensional electron density distributions of the EUV-emitting plasma were obtained using t...
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Veröffentlicht in: | Journal of physics. D, Applied physics Applied physics, 2011-04, Vol.44 (14), p.145203 |
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Hauptverfasser: | , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Dynamics of the imploding plasma and its relations to the 13.5 nm EUV emissions have been experimentally investigated for a laser-assisted Sn based discharge-produced plasma EUV source. The behaviours and two-dimensional electron density distributions of the EUV-emitting plasma were obtained using the time-resolved shadowgraph and Nomarski interferometric techniques. Observation of the plasma piston in the prepinch phase justified the validity of the zero-dimensional thin-shell model, from which the ion charge state of the prepinch plasma in the cathode region was estimated. The sausage (
m
= 0) instability that usually enhances the EUV emission was observed, with the radial electron density distribution that displays a concave shape at the crest of the plasma and a bell shape at the neck; the maximum of the electron density is located at one peak of the concave distribution at the crest instead of the neck. Intense EUV emission was produced by the
Z
-pinch plasma with the electron density (2.0–3.0) × 10
18
cm
−3
. Moreover, the shock waves generated in the anode region can also produce in-band EUV emission with the intensity of 30% of that from the Z-pinch plasma. |
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ISSN: | 0022-3727 1361-6463 |
DOI: | 10.1088/0022-3727/44/14/145203 |