Distance measurement by multiple-wavelength interferometry: Optoelectronic distance/displacement measurements and applications

Bibliographische Detailangaben

Veröffentlicht in:	Journal of optics 1998, Vol.29 (3), p.105-114
Hauptverfasser:	DÄNDLIKER, R, SALVADE, Y, ZIMMERMANN, E
Format:	Artikel
Sprache:	eng
Schlagworte:	Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Interferometers Measurements common to several branches of physics and astronomy Metrology, measurements and laboratory procedures Optical instruments, equipment and techniques Physics Spatial dimensions (e.g.: position, lengths, volume, angles, displacements, including nanometer-scale displacements) Spatial dimensions (eg, position, lengths, volume, angles, displacements, including nanometer-scale displacements)
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