Micro- and nano-electromechanical resonators based on SiC and group III-nitrides for sensor applications : Integrated Electroceramic Functional Structures

Bibliographische Detailangaben

Veröffentlicht in:	Physica status solidi. A, Applications and materials science Applications and materials science, 2011, Vol.208 (2), p.357-376
Hauptverfasser:	BRUECKNER, K, NIEBELSCHUETZ, F, TONISCH, K, FOERSTER, Ch, CIMALLA, V, STEPHAN, R, PEZOLDT, J, STAUDEN, T, AMBACHER, O, HEIN, M. A
Format:	Artikel
Sprache:	eng
Schlagworte:	Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical instruments, equipment and techniques Micromechanical devices and systems Physics
Online-Zugang:	Volltext
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