Analysis of Metal-Insulator-Metal Structure and Its Application to Sensor: SPECIAL ISSUE ON 2010 INTERNATIONAL MICROWAVE SYMPOSIUM

Bibliographische Detailangaben

Veröffentlicht in:	IEEE transactions on microwave theory and techniques 2010, Vol.58 (12), p.3954-3960
Hauptverfasser:	TAMURA, Masaya, KAGATA, Hiroshi
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Compound structure devices Electronics Exact sciences and technology General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Sensors (chemical, optical, electrical, movement, gas, etc.) remote sensing
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