Characterization of the optical properties of PECVD SiNx films using ellipsometry and reflectometry

Bibliographische Detailangaben

Hauptverfasser:	ASINOVSKY, L, SHEN, F, YAMAGUCHI, T
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Optical instruments, equipment and techniques Physics Polarimeters and ellipsometers Refractometers and reflectometers
Online-Zugang:	Volltext
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