Piezoresistive friction force sensor for tribological research

A piezoresistive friction force sensor for tribological research on magnetic storage devices was designed, realized and characterized. A very simple potassium hydroxide etching technique was used for the fabrication of a rectangular shaped construction in a (100) silicon water.

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Bibliographische Detailangaben
Veröffentlicht in:	Journal of micromechanics and microengineering 1998-06, Vol.8 (2), p.138-140, Article 138
Hauptverfasser:	Burger, Johannes, Berenschot, Erwin, Burger, Gert-Jan, Visscher, Harm, Elwenspoek, Miko
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Etching Exact sciences and technology General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Magnetic and optical mass memories Magnetic storage Microelectromechanical devices Microelectronic processing Physics Piezoelectric devices Sensors (chemical, optical, electrical, movement, gas, etc.) remote sensing Silicon wafers Storage and reproduction of information Tribology
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Beschreibung
Zusammenfassung:	A piezoresistive friction force sensor for tribological research on magnetic storage devices was designed, realized and characterized. A very simple potassium hydroxide etching technique was used for the fabrication of a rectangular shaped construction in a (100) silicon water.
ISSN:	0960-1317 1361-6439
DOI:	10.1088/0960-1317/8/2/023