Practical OEICs based on the monolithic integration of GaAs-InGaP LEDs with commercial GaAs VLSI electronics
Recent advances in the epitaxy-on-electronics (EoE) integration process, which combines commercial GaAs VLSI electronics with conventional epitaxial growth and fabrication to produce complex, monolithic optoelectronic integrated circuits (OEICs), have resulted in improved integrated light-emitting d...
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Veröffentlicht in: | IEEE journal of quantum electronics 1998-07, Vol.34 (7), p.1117-1123 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Recent advances in the epitaxy-on-electronics (EoE) integration process, which combines commercial GaAs VLSI electronics with conventional epitaxial growth and fabrication to produce complex, monolithic optoelectronic integrated circuits (OEICs), have resulted in improved integrated light-emitting diodes (LEDs), eliminated any impact on the preexisting electronics, and increased the robustness of the integration process. An EoE-integrated OEIC combining a photodetector, electronics, and LED is presented which demonstrates the capability of this technology to now satisfy practical optoelectronic systems requirements. |
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ISSN: | 0018-9197 1558-1713 |
DOI: | 10.1109/3.687852 |