Practical OEICs based on the monolithic integration of GaAs-InGaP LEDs with commercial GaAs VLSI electronics

Recent advances in the epitaxy-on-electronics (EoE) integration process, which combines commercial GaAs VLSI electronics with conventional epitaxial growth and fabrication to produce complex, monolithic optoelectronic integrated circuits (OEICs), have resulted in improved integrated light-emitting d...

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Veröffentlicht in:IEEE journal of quantum electronics 1998-07, Vol.34 (7), p.1117-1123
Hauptverfasser: Ahadian, J.F., Vaidyanathan, P.T., Patterson, S.G., Royter, Y., Mull, D., Petrich, G.S., Goodhue, W.D., Prasad, S., Kolodziejski, L.A., Fonstad, C.G.
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Sprache:eng
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Zusammenfassung:Recent advances in the epitaxy-on-electronics (EoE) integration process, which combines commercial GaAs VLSI electronics with conventional epitaxial growth and fabrication to produce complex, monolithic optoelectronic integrated circuits (OEICs), have resulted in improved integrated light-emitting diodes (LEDs), eliminated any impact on the preexisting electronics, and increased the robustness of the integration process. An EoE-integrated OEIC combining a photodetector, electronics, and LED is presented which demonstrates the capability of this technology to now satisfy practical optoelectronic systems requirements.
ISSN:0018-9197
1558-1713
DOI:10.1109/3.687852