Modeling and Characterization of Piezoelectric d33-Mode MEMS Energy Harvester

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Veröffentlicht in:	Journal of microelectromechanical systems 2010-10, Vol.19 (5), p.1215-1222
Hauptverfasser:	JONG CHEOL PARK, JAE YEONG PARK, LEE, Yoon-Pyo
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical instruments, equipment and techniques Microelectronic fabrication (materials and surfaces technology) Micromechanical devices and systems Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Transducers
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