Fractionized calibration of the sample stage used in an AFM-probe mechanical testing system: MICRO AND NANO METROLOGY IN EXPERIMENTAL MECHANICS
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| Veröffentlicht in: | Optics and lasers in engineering 2010, Vol.48 (11), p.1076-1081 |
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| Sprache: | eng |
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| container_end_page | 1081 |
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| container_issue | 11 |
| container_start_page | 1076 |
| container_title | Optics and lasers in engineering |
| container_volume | 48 |
| creator | DONGCHUAN SU XIDE LI |
| description | |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 0143-8166 |
| ispartof | Optics and lasers in engineering, 2010, Vol.48 (11), p.1076-1081 |
| issn | 0143-8166 1873-0302 |
| language | eng |
| recordid | cdi_pascalfrancis_primary_23213864 |
| source | ScienceDirect Journals (5 years ago - present) |
| subjects | Atomic force microscopes Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Interferometers Optical instruments, equipment and techniques Physics Scanning probe microscopes, components and techniques |
| title | Fractionized calibration of the sample stage used in an AFM-probe mechanical testing system: MICRO AND NANO METROLOGY IN EXPERIMENTAL MECHANICS |
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