Fractionized calibration of the sample stage used in an AFM-probe mechanical testing system: MICRO AND NANO METROLOGY IN EXPERIMENTAL MECHANICS

Bibliographische Detailangaben

Veröffentlicht in:	Optics and lasers in engineering 2010, Vol.48 (11), p.1076-1081
Hauptverfasser:	DONGCHUAN SU, XIDE LI
Format:	Artikel
Sprache:	eng
Schlagworte:	Atomic force microscopes Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Interferometers Optical instruments, equipment and techniques Physics Scanning probe microscopes, components and techniques
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!