The Way to High Volume Fabrication of Lab-on-a-Chip Devices: A Technological Approach for Polymer Based Microfluidic Systems with Integrated Active Valves and Pumps: Special Issue on Microactuators for Fludic Applications

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Veröffentlicht in:	Journal of microelectronics and electronic packaging 2009, Vol.6 (4), p.198-204
Hauptverfasser:	RUPP, Jochen, SCHMIDT, Manuela, ZENGERLE, Roland, DAUB, Martina, GÜNTHER, Bettina, STUMBER, Michael, ZINOBER, Sven, MÜLLER-FIEDLER, Roland, ALABSI, Bashir, ROTHACHER, Peter, MÜLLER, Claas, REINECKE, Holler
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied fluid mechanics Applied sciences Design. Technologies. Operation analysis. Testing Electronic equipment and fabrication. Passive components, printed wiring boards, connectics Electronics Exact sciences and technology Fluid dynamics Fluidics Fundamental areas of phenomenology (including applications) Integrated circuits Microelectronic fabrication (materials and surfaces technology) Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ISSN:	1551-4897