Experimental Study of SiO2 Soot Deposition using the Outside Vapor Deposition Method
The deposition of pure silica layers using the Outside Vapor Deposition method has been studied. The experimental study focuses on some fabrication parameters that have to be adjusted in order to work with a target temperature optimized for deposition of pure silica compatible with large volume depo...
Gespeichert in:
Veröffentlicht in: | Aerosol science and technology 2010-05, Vol.44 (5), p.388-394 |
---|---|
Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The deposition of pure silica layers using the Outside Vapor Deposition method has been studied. The experimental study focuses on some fabrication parameters that have to be adjusted in order to work with a target temperature optimized for deposition of pure silica compatible with large volume deposition and post-treatments. It is experimentally shown that the optimized soot porous preforms are constituted by homogeneous silica spherical particles of 100 to 110 nm in diameter and have, in this case, densities approximately equal to 0.35 g.cm
-3
. |
---|---|
ISSN: | 0278-6826 1521-7388 |
DOI: | 10.1080/02786821003671315 |