Development of Y-Shaped Filtered-Arc-Deposition System for Preparing Multielement Composition-Controlled Film: Special Issue on Plasma-Based Surface Modification and Treatment Technologies

Bibliographische Detailangaben

Veröffentlicht in:	IEEE transactions on plasma science 2009, Vol.37 (7), p.1140-1145
Hauptverfasser:	TANOUE, Hideto, HIKOSAKA, Hiroki, YASUI, Haruyuki, MASHIKI, Takayuki, OKE, Shinichiro, SUDA, Yoshiyuki, TAKIKAWA, Hirofumi, HASEGAWA, Yushi, TAKI, Makoto, KAMIYA, Masao, ISHIKAWA, Takeshi
Format:	Artikel
Sprache:	eng
Schlagworte:	Exact sciences and technology Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma applications Plasma properties Plasma-based ion implantation and deposition Transport properties
Online-Zugang:	Volltext
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