M3-Deterministic, Multiscale, Multirobot Platform for Microsystems Packaging: Design and Quasi-Static Precision Evaluation

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Veröffentlicht in:	IEEE transactions on automation science and engineering 2009, Vol.6 (2), p.345-361
Hauptverfasser:	POPA, Dan O, MURTHY, Rakesh, DAS, Aditya N
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Computer science control theory systems Control theory. Systems Electronics Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Microelectronic fabrication (materials and surfaces technology) Micromechanical devices and systems Physics Precision engineering, watch making Robotics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ISSN:	1545-5955 1558-3783