Stroboscopic digital speckle pattern interferometry for vibration analysis of microsystem: Recent Developments in Interferometry for Microsystems Metrology
Gespeichert in:
| Veröffentlicht in: | Optics and lasers in engineering 2009, Vol.47 (2), p.252-258 |
|---|---|
| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 258 |
|---|---|
| container_issue | 2 |
| container_start_page | 252 |
| container_title | Optics and lasers in engineering |
| container_volume | 47 |
| creator | YANG, L. X SCHUTH, M THOMAS, D WANG, Y. H VOESING, F |
| description | |
| format | Article |
| fullrecord | <record><control><sourceid>pascalfrancis</sourceid><recordid>TN_cdi_pascalfrancis_primary_21019309</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>21019309</sourcerecordid><originalsourceid>FETCH-pascalfrancis_primary_210193093</originalsourceid><addsrcrecordid>eNqNyr2KAjEQAOAgCq4_7zCN5UJiZNVaFHttrpIxJjKaTcJMEPbtz-Ie4Kqv-UaqMbutbbXV67FqtNnYdme6bqpmIi-tTbcxplE_l8r5nsXlQg4e9KSKEaR4944eCtbqOQGlL8Fz7n3lAUJm-NCdsVJOgAnjICSQA_TkOMsg1fcLNQkYxS__nKvV6Xg9nNuC4jAGxuRIboWpRx5ua6PN3uq9_e_7BQn0R0k</addsrcrecordid><sourcetype>Index Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Stroboscopic digital speckle pattern interferometry for vibration analysis of microsystem: Recent Developments in Interferometry for Microsystems Metrology</title><source>Elsevier ScienceDirect Journals</source><creator>YANG, L. X ; SCHUTH, M ; THOMAS, D ; WANG, Y. H ; VOESING, F</creator><creatorcontrib>YANG, L. X ; SCHUTH, M ; THOMAS, D ; WANG, Y. H ; VOESING, F</creatorcontrib><identifier>ISSN: 0143-8166</identifier><identifier>EISSN: 1873-0302</identifier><identifier>CODEN: OLENDN</identifier><language>eng</language><publisher>Kidlington: Elsevier</publisher><subject>Applied sciences ; Electronics ; Exact sciences and technology ; Fundamental areas of phenomenology (including applications) ; Imaging and optical processing ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; Interferometers ; Micro- and nanoelectromechanical devices (mems/nems) ; Optical instruments, equipment and techniques ; Optics ; Physics ; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices ; Speckle and moire patterns</subject><ispartof>Optics and lasers in engineering, 2009, Vol.47 (2), p.252-258</ispartof><rights>2009 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,4010</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=21019309$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>YANG, L. X</creatorcontrib><creatorcontrib>SCHUTH, M</creatorcontrib><creatorcontrib>THOMAS, D</creatorcontrib><creatorcontrib>WANG, Y. H</creatorcontrib><creatorcontrib>VOESING, F</creatorcontrib><title>Stroboscopic digital speckle pattern interferometry for vibration analysis of microsystem: Recent Developments in Interferometry for Microsystems Metrology</title><title>Optics and lasers in engineering</title><subject>Applied sciences</subject><subject>Electronics</subject><subject>Exact sciences and technology</subject><subject>Fundamental areas of phenomenology (including applications)</subject><subject>Imaging and optical processing</subject><subject>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</subject><subject>Interferometers</subject><subject>Micro- and nanoelectromechanical devices (mems/nems)</subject><subject>Optical instruments, equipment and techniques</subject><subject>Optics</subject><subject>Physics</subject><subject>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</subject><subject>Speckle and moire patterns</subject><issn>0143-8166</issn><issn>1873-0302</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2009</creationdate><recordtype>article</recordtype><recordid>eNqNyr2KAjEQAOAgCq4_7zCN5UJiZNVaFHttrpIxJjKaTcJMEPbtz-Ie4Kqv-UaqMbutbbXV67FqtNnYdme6bqpmIi-tTbcxplE_l8r5nsXlQg4e9KSKEaR4944eCtbqOQGlL8Fz7n3lAUJm-NCdsVJOgAnjICSQA_TkOMsg1fcLNQkYxS__nKvV6Xg9nNuC4jAGxuRIboWpRx5ua6PN3uq9_e_7BQn0R0k</recordid><startdate>2009</startdate><enddate>2009</enddate><creator>YANG, L. X</creator><creator>SCHUTH, M</creator><creator>THOMAS, D</creator><creator>WANG, Y. H</creator><creator>VOESING, F</creator><general>Elsevier</general><scope>IQODW</scope></search><sort><creationdate>2009</creationdate><title>Stroboscopic digital speckle pattern interferometry for vibration analysis of microsystem</title><author>YANG, L. X ; SCHUTH, M ; THOMAS, D ; WANG, Y. H ; VOESING, F</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-pascalfrancis_primary_210193093</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2009</creationdate><topic>Applied sciences</topic><topic>Electronics</topic><topic>Exact sciences and technology</topic><topic>Fundamental areas of phenomenology (including applications)</topic><topic>Imaging and optical processing</topic><topic>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</topic><topic>Interferometers</topic><topic>Micro- and nanoelectromechanical devices (mems/nems)</topic><topic>Optical instruments, equipment and techniques</topic><topic>Optics</topic><topic>Physics</topic><topic>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</topic><topic>Speckle and moire patterns</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>YANG, L. X</creatorcontrib><creatorcontrib>SCHUTH, M</creatorcontrib><creatorcontrib>THOMAS, D</creatorcontrib><creatorcontrib>WANG, Y. H</creatorcontrib><creatorcontrib>VOESING, F</creatorcontrib><collection>Pascal-Francis</collection><jtitle>Optics and lasers in engineering</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>YANG, L. X</au><au>SCHUTH, M</au><au>THOMAS, D</au><au>WANG, Y. H</au><au>VOESING, F</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Stroboscopic digital speckle pattern interferometry for vibration analysis of microsystem: Recent Developments in Interferometry for Microsystems Metrology</atitle><jtitle>Optics and lasers in engineering</jtitle><date>2009</date><risdate>2009</risdate><volume>47</volume><issue>2</issue><spage>252</spage><epage>258</epage><pages>252-258</pages><issn>0143-8166</issn><eissn>1873-0302</eissn><coden>OLENDN</coden><cop>Kidlington</cop><pub>Elsevier</pub></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0143-8166 |
| ispartof | Optics and lasers in engineering, 2009, Vol.47 (2), p.252-258 |
| issn | 0143-8166 1873-0302 |
| language | eng |
| recordid | cdi_pascalfrancis_primary_21019309 |
| source | Elsevier ScienceDirect Journals |
| subjects | Applied sciences Electronics Exact sciences and technology Fundamental areas of phenomenology (including applications) Imaging and optical processing Instruments, apparatus, components and techniques common to several branches of physics and astronomy Interferometers Micro- and nanoelectromechanical devices (mems/nems) Optical instruments, equipment and techniques Optics Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Speckle and moire patterns |
| title | Stroboscopic digital speckle pattern interferometry for vibration analysis of microsystem: Recent Developments in Interferometry for Microsystems Metrology |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-01T14%3A05%3A41IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-pascalfrancis&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Stroboscopic%20digital%20speckle%20pattern%20interferometry%20for%20vibration%20analysis%20of%20microsystem:%20Recent%20Developments%20in%20Interferometry%20for%20Microsystems%20Metrology&rft.jtitle=Optics%20and%20lasers%20in%20engineering&rft.au=YANG,%20L.%20X&rft.date=2009&rft.volume=47&rft.issue=2&rft.spage=252&rft.epage=258&rft.pages=252-258&rft.issn=0143-8166&rft.eissn=1873-0302&rft.coden=OLENDN&rft_id=info:doi/&rft_dat=%3Cpascalfrancis%3E21019309%3C/pascalfrancis%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |