Stroboscopic digital speckle pattern interferometry for vibration analysis of microsystem: Recent Developments in Interferometry for Microsystems Metrology

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	Optics and lasers in engineering 2009, Vol.47 (2), p.252-258
Hauptverfasser:	YANG, L. X, SCHUTH, M, THOMAS, D, WANG, Y. H, VOESING, F
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Fundamental areas of phenomenology (including applications) Imaging and optical processing Instruments, apparatus, components and techniques common to several branches of physics and astronomy Interferometers Micro- and nanoelectromechanical devices (mems/nems) Optical instruments, equipment and techniques Optics Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Speckle and moire patterns
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:
ISSN:	0143-8166 1873-0302