SCANNING INTERFEROMETRY : Measuring microscale devices : Metrology

Bibliographische Detailangaben

Veröffentlicht in:	Nature photonics 2008, Vol.2 (11), p.661-663
Hauptverfasser:	CONROV, Mike, MANSFIELD, Daniel
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical instruments, equipment and techniques Micro- and nanoelectromechanical devices (mems/nems) Micromechanical devices and systems Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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