Electrostatically Actuated Two-Dimensional Optical Scanner Having a High Resonant Frequency Ratio of Fast/Slow Axes : Electronic displays

Electrostatically Actuated Two-Dimensional Optical Scanner Having a High Resonant Frequency Ratio of Fast/Slow Axes : Electronic displays

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Veröffentlicht in:IEICE transactions on electronics 2008, Vol.91 (10), p.1611-1615
Hauptverfasser: NOGE, Hiroshi, HAGIHARA, Yosuke, KAWANO, Kiyohiko, UEDA, Hideki, YOSHIHARA, Takaaki
Format: Artikel
Sprache:eng
Schlagworte:
Applied sciences
Computer science
control theory
systems
Control theory. Systems
Display
Electronics
Exact sciences and technology
Imaging devices
Micro- and nanoelectromechanical devices (mems/nems)
Robotics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ISSN:0916-8524
1745-1353