Dual-beam actuation of piezoelectric AIN RF MEMS switches monolithically integrated with AIN contour-mode resonators
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| Veröffentlicht in: | Journal of micromechanics and microengineering 2008, Vol.18 (10) |
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| container_issue | 10 |
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| container_title | Journal of micromechanics and microengineering |
| container_volume | 18 |
| creator | MAHAMEED, Rashed SINHA, Nipun PISANI, Marcelo B PIAZZA, Gianluca |
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| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 0960-1317 |
| ispartof | Journal of micromechanics and microengineering, 2008, Vol.18 (10) |
| issn | 0960-1317 1361-6439 |
| language | eng |
| recordid | cdi_pascalfrancis_primary_20750954 |
| source | IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link |
| subjects | Applied sciences Circuit properties Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits |
| title | Dual-beam actuation of piezoelectric AIN RF MEMS switches monolithically integrated with AIN contour-mode resonators |
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