Deposition of tantalum oxide films by UV laser reactive ablation in O3 ambient

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Veröffentlicht in:	Japanese journal of applied physics 1997, Vol.36 (11), p.6714-6717
Hauptverfasser:	ZHENGWEN, F, MINGFEI, Z, QIZONG, Q, SHENKUN, Z, FANG, L
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Conductivity phenomena in semiconductors and insulators Dielectric properties of solids and liquids Dielectrics, piezoelectrics, and ferroelectrics and their properties Electronic transport in condensed matter Exact sciences and technology Low-field transport and mobility piezoresistance Permittivity (dielectric function) Physics
Online-Zugang:	Volltext
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