Formation and Expansion Phases of an Atmospheric Pressure Glow Discharge in a PECVD Reactor via Fast ICCD Imaging: Images in Plasma Science
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| Veröffentlicht in: | IEEE transactions on plasma science 2008, Vol.36 (4), p.968-969 |
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| container_end_page | 969 |
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| container_issue | 4 |
| container_start_page | 968 |
| container_title | IEEE transactions on plasma science |
| container_volume | 36 |
| creator | STAROSTIN, Sergey A ELSABBAGH, Mansour A. M ALDEA, Eugen DE VRIES, Hindrik CREATORE, Mariadriana VAN DE SANDEN, M. C. M |
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| fulltext | fulltext |
| identifier | ISSN: 0093-3813 |
| ispartof | IEEE transactions on plasma science, 2008, Vol.36 (4), p.968-969 |
| issn | 0093-3813 1939-9375 |
| language | eng |
| recordid | cdi_pascalfrancis_primary_20652996 |
| source | IEEE Electronic Library (IEL) |
| subjects | Electric discharges Exact sciences and technology Glow corona Other gas discharges Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma applications Plasma-based ion implantation and deposition |
| title | Formation and Expansion Phases of an Atmospheric Pressure Glow Discharge in a PECVD Reactor via Fast ICCD Imaging: Images in Plasma Science |
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