Tribological improvement of moving microparts by application of thin films and micropatterning

The relevance of active microsystems continually increases and with the expansion of applications also aspects of reliability and durability of the moving microparts. In particular, the microtribological improvement of active MEMS therefore was investigated and improved. On the one hand, the influen...

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Veröffentlicht in:	Journal of physics. Condensed matter 2008-09, Vol.20 (35), p.354018-354018 (9)
Hauptverfasser:	Bandorf, R, Paulkowski, D M, Schiffmann, K I, Küster, R L A
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Mechanical and acoustical properties Physical properties of thin films, nonelectronic Physics Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
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Beschreibung
Zusammenfassung:	The relevance of active microsystems continually increases and with the expansion of applications also aspects of reliability and durability of the moving microparts. In particular, the microtribological improvement of active MEMS therefore was investigated and improved. On the one hand, the influence of different thin films was investigated; on the other hand, improvement by micropatterning of the tribological surfaces in combination with coatings was studied.
ISSN:	0953-8984 1361-648X
DOI:	10.1088/0953-8984/20/35/354018