Integrated 3D sound intensity sensor with four-wire particle velocity sensors
A new symmetrical four-wire sensor configuration has resulted in a fully integrated sound intensity sensor with significant lower noise floor and smaller size than its predecessors. An integrated sound pressure sensor was further miniaturized by using a folded ldquoback chamberpsila at both sides of...
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| creator | Yntema, D.R. van Honschoten, J.W. Wiegerink, R. |
| description | A new symmetrical four-wire sensor configuration has resulted in a fully integrated sound intensity sensor with significant lower noise floor and smaller size than its predecessors. An integrated sound pressure sensor was further miniaturized by using a folded ldquoback chamberpsila at both sides of the chip. |
| doi_str_mv | 10.1109/DTIP.2008.4752976 |
| format | Conference Proceeding |
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| identifier | ISBN: 2355000069 |
| ispartof | 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, 2008, p.168-170 |
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| language | eng |
| recordid | cdi_pascalfrancis_primary_20508145 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Acoustic measurements Acoustic noise Acoustic sensors Exact sciences and technology General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Particle measurements Physics Pressure measurement Sensor phenomena and characterization Sensors (chemical, optical, electrical, movement, gas, etc.) remote sensing Temperature sensors Thermal sensors Velocity measurement Wires |
| title | Integrated 3D sound intensity sensor with four-wire particle velocity sensors |
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