Integrated 3D sound intensity sensor with four-wire particle velocity sensors

A new symmetrical four-wire sensor configuration has resulted in a fully integrated sound intensity sensor with significant lower noise floor and smaller size than its predecessors. An integrated sound pressure sensor was further miniaturized by using a folded ldquoback chamberpsila at both sides of...

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Bibliographische Detailangaben
Hauptverfasser:	Yntema, D.R., van Honschoten, J.W., Wiegerink, R.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Acoustic measurements Acoustic noise Acoustic sensors Exact sciences and technology General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Particle measurements Physics Pressure measurement Sensor phenomena and characterization Sensors (chemical, optical, electrical, movement, gas, etc.) remote sensing Temperature sensors Thermal sensors Velocity measurement Wires
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Beschreibung
Zusammenfassung:	A new symmetrical four-wire sensor configuration has resulted in a fully integrated sound intensity sensor with significant lower noise floor and smaller size than its predecessors. An integrated sound pressure sensor was further miniaturized by using a folded ldquoback chamberpsila at both sides of the chip.
DOI:	10.1109/DTIP.2008.4752976