High-Performance Poly-Si TFTs With Pr2O3 Gate Dielectric

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Veröffentlicht in:	IEEE electron device letters 2008, Vol.29 (1), p.96-98
Hauptverfasser:	CHANG, Chia-Wen, DENG, Chih-Kang, HUANG, Jiun-Jia, CHANG, Hong-Ren, LEI, Tan-Fu
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Display Electronics Exact sciences and technology Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Transistors
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source	IEEE Electronic Library (IEL)
subjects	Applied sciences Display Electronics Exact sciences and technology Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Transistors
title	High-Performance Poly-Si TFTs With Pr2O3 Gate Dielectric
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