Experimental and theoretical study of ion energy distribution function in single and dual frequency RF discharges: Modeling and simulation of collisional low-temperature plasmas

Experimental and theoretical study of ion energy distribution function in single and dual frequency RF discharges: Modeling and simulation of collisional low-temperature plasmas

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Veröffentlicht in:IEEE transactions on plasma science 2007, Vol.35 (5), p.1229-1240
Hauptverfasser: RAKHIMOVA, Tatyana V, BRAGINSKY, Oleg V, VOLOSHIN, Dmitry G, IVANOV, Vladimir V, KOVALEV, Alexander S, LOPAEV, Dmitry V, MANKELEVICH, Yuri A, OLEVANOV, Michael A, PROSHINA, Olga V, RAKHIMOV, Alexander T, VASILIEVA, Anna N
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container_end_page 1240
container_issue 5
container_start_page 1229
container_title IEEE transactions on plasma science
container_volume 35
creator RAKHIMOVA, Tatyana V
BRAGINSKY, Oleg V
VOLOSHIN, Dmitry G
IVANOV, Vladimir V
KOVALEV, Alexander S
LOPAEV, Dmitry V
MANKELEVICH, Yuri A
OLEVANOV, Michael A
PROSHINA, Olga V
RAKHIMOV, Alexander T
VASILIEVA, Anna N
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title Experimental and theoretical study of ion energy distribution function in single and dual frequency RF discharges: Modeling and simulation of collisional low-temperature plasmas
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