Plasma distribution in a triple-cathode vacuum arc deposition apparatus
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| Veröffentlicht in: | Plasma sources science & technology 1999-08, Vol.8 (3), p.355-362 |
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| container_end_page | 362 |
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| container_issue | 3 |
| container_start_page | 355 |
| container_title | Plasma sources science & technology |
| container_volume | 8 |
| creator | Ben-Ami, R Zhitomirsky, V N Boxman, R L Goldsmith, S |
| description | |
| doi_str_mv | 10.1088/0963-0252/8/3/303 |
| format | Article |
| fullrecord | <record><control><sourceid>pascalfrancis_cross</sourceid><recordid>TN_cdi_pascalfrancis_primary_1894973</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>1894973</sourcerecordid><originalsourceid>FETCH-LOGICAL-c342t-2e82efbac26ee1ce02c33665f1935e0c336b5da45446265a03c9df75d0f433cd3</originalsourceid><addsrcrecordid>eNqNkE9LAzEUxIMoWKsfwNsePHhw3SRvk2aPUmwVCnrQc3jNH4xsuyHZFfz2dq3ooRdPj-H9ZmCGkEtGbxlVqqKNhJJywStVQQUUjsiEgWSlFI04JpPf_yk5y_mdUsYUn03I8rnFvMHChtynsB760G2LsC2w2MnYutJg_9ZZV3ygGYZNgckU1sUuh28SY8SE_ZDPyYnHNruLnzslr4v7l_lDuXpaPs7vVqWBmvcld4o7v0bDpXPMOMoNgJTCswaEo6NYC4u1qGvJpUAKprF-Jiz1NYCxMCVsn2tSl3NyXscUNpg-NaN6XEKPTfXYVCsNerfEznO190TMBlufcGtC_jOqpm5mI3azx0IX_5V6fYgfYDpaD19k3nhE</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Plasma distribution in a triple-cathode vacuum arc deposition apparatus</title><source>IOP Publishing Journals</source><source>Institute of Physics (IOP) Journals - HEAL-Link</source><creator>Ben-Ami, R ; Zhitomirsky, V N ; Boxman, R L ; Goldsmith, S</creator><creatorcontrib>Ben-Ami, R ; Zhitomirsky, V N ; Boxman, R L ; Goldsmith, S</creatorcontrib><identifier>ISSN: 0963-0252</identifier><identifier>EISSN: 1361-6595</identifier><identifier>DOI: 10.1088/0963-0252/8/3/303</identifier><language>eng</language><publisher>Bristol: IOP Publishing</publisher><subject>Discharge in vacuum ; Electric discharges ; Exact sciences and technology ; Particle beam interactions in plasma ; Physics ; Physics of gases, plasmas and electric discharges ; Physics of plasmas and electric discharges ; Plasma applications ; Plasma interactions (nonlaser)</subject><ispartof>Plasma sources science & technology, 1999-08, Vol.8 (3), p.355-362</ispartof><rights>1999 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c342t-2e82efbac26ee1ce02c33665f1935e0c336b5da45446265a03c9df75d0f433cd3</citedby><cites>FETCH-LOGICAL-c342t-2e82efbac26ee1ce02c33665f1935e0c336b5da45446265a03c9df75d0f433cd3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://iopscience.iop.org/article/10.1088/0963-0252/8/3/303/pdf$$EPDF$$P50$$Giop$$H</linktopdf><link.rule.ids>314,776,780,27901,27902,53805,53885</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=1894973$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Ben-Ami, R</creatorcontrib><creatorcontrib>Zhitomirsky, V N</creatorcontrib><creatorcontrib>Boxman, R L</creatorcontrib><creatorcontrib>Goldsmith, S</creatorcontrib><title>Plasma distribution in a triple-cathode vacuum arc deposition apparatus</title><title>Plasma sources science & technology</title><subject>Discharge in vacuum</subject><subject>Electric discharges</subject><subject>Exact sciences and technology</subject><subject>Particle beam interactions in plasma</subject><subject>Physics</subject><subject>Physics of gases, plasmas and electric discharges</subject><subject>Physics of plasmas and electric discharges</subject><subject>Plasma applications</subject><subject>Plasma interactions (nonlaser)</subject><issn>0963-0252</issn><issn>1361-6595</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1999</creationdate><recordtype>article</recordtype><recordid>eNqNkE9LAzEUxIMoWKsfwNsePHhw3SRvk2aPUmwVCnrQc3jNH4xsuyHZFfz2dq3ooRdPj-H9ZmCGkEtGbxlVqqKNhJJywStVQQUUjsiEgWSlFI04JpPf_yk5y_mdUsYUn03I8rnFvMHChtynsB760G2LsC2w2MnYutJg_9ZZV3ygGYZNgckU1sUuh28SY8SE_ZDPyYnHNruLnzslr4v7l_lDuXpaPs7vVqWBmvcld4o7v0bDpXPMOMoNgJTCswaEo6NYC4u1qGvJpUAKprF-Jiz1NYCxMCVsn2tSl3NyXscUNpg-NaN6XEKPTfXYVCsNerfEznO190TMBlufcGtC_jOqpm5mI3azx0IX_5V6fYgfYDpaD19k3nhE</recordid><startdate>19990801</startdate><enddate>19990801</enddate><creator>Ben-Ami, R</creator><creator>Zhitomirsky, V N</creator><creator>Boxman, R L</creator><creator>Goldsmith, S</creator><general>IOP Publishing</general><general>Institute of Physics</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>19990801</creationdate><title>Plasma distribution in a triple-cathode vacuum arc deposition apparatus</title><author>Ben-Ami, R ; Zhitomirsky, V N ; Boxman, R L ; Goldsmith, S</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c342t-2e82efbac26ee1ce02c33665f1935e0c336b5da45446265a03c9df75d0f433cd3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1999</creationdate><topic>Discharge in vacuum</topic><topic>Electric discharges</topic><topic>Exact sciences and technology</topic><topic>Particle beam interactions in plasma</topic><topic>Physics</topic><topic>Physics of gases, plasmas and electric discharges</topic><topic>Physics of plasmas and electric discharges</topic><topic>Plasma applications</topic><topic>Plasma interactions (nonlaser)</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Ben-Ami, R</creatorcontrib><creatorcontrib>Zhitomirsky, V N</creatorcontrib><creatorcontrib>Boxman, R L</creatorcontrib><creatorcontrib>Goldsmith, S</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><jtitle>Plasma sources science & technology</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Ben-Ami, R</au><au>Zhitomirsky, V N</au><au>Boxman, R L</au><au>Goldsmith, S</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Plasma distribution in a triple-cathode vacuum arc deposition apparatus</atitle><jtitle>Plasma sources science & technology</jtitle><date>1999-08-01</date><risdate>1999</risdate><volume>8</volume><issue>3</issue><spage>355</spage><epage>362</epage><pages>355-362</pages><issn>0963-0252</issn><eissn>1361-6595</eissn><cop>Bristol</cop><pub>IOP Publishing</pub><doi>10.1088/0963-0252/8/3/303</doi><tpages>8</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0963-0252 |
| ispartof | Plasma sources science & technology, 1999-08, Vol.8 (3), p.355-362 |
| issn | 0963-0252 1361-6595 |
| language | eng |
| recordid | cdi_pascalfrancis_primary_1894973 |
| source | IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link |
| subjects | Discharge in vacuum Electric discharges Exact sciences and technology Particle beam interactions in plasma Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma applications Plasma interactions (nonlaser) |
| title | Plasma distribution in a triple-cathode vacuum arc deposition apparatus |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-10T00%3A47%3A47IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-pascalfrancis_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Plasma%20distribution%20in%20a%20triple-cathode%20vacuum%20arc%20deposition%20apparatus&rft.jtitle=Plasma%20sources%20science%20&%20technology&rft.au=Ben-Ami,%20R&rft.date=1999-08-01&rft.volume=8&rft.issue=3&rft.spage=355&rft.epage=362&rft.pages=355-362&rft.issn=0963-0252&rft.eissn=1361-6595&rft_id=info:doi/10.1088/0963-0252/8/3/303&rft_dat=%3Cpascalfrancis_cross%3E1894973%3C/pascalfrancis_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |