Development of UV-LIGA integrated vibrometer using 3 x 3 directional coupler

Bibliographische Detailangaben

Hauptverfasser:	ADAMOVIC, Nadja, VUJANIC, Aleksandar
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Applied sciences Circuit properties Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Integrated optics. Optical fibers and wave guides Microelectronic fabrication (materials and surfaces technology) Optical and optoelectronic circuits Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online-Zugang:	Volltext
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