Control of nitrogen atomic density and enthalpy flow into reaction chamber in Ar/N2 pulse-modulated induction thermal plasmas

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Hauptverfasser:	TANAKA, Yasunori, MUROYA, Takafumi, HAYASHI, Kouhei, UESUGI, Yoshihiko
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Exact sciences and technology Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma devices Plasma torches
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creator	TANAKA, Yasunori MUROYA, Takafumi HAYASHI, Kouhei UESUGI, Yoshihiko
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doi_str_mv	10.1109/TPS.2007.892709
format	Conference Proceeding
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source	IEEE Electronic Library (IEL)
subjects	Exact sciences and technology Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma devices Plasma torches
title	Control of nitrogen atomic density and enthalpy flow into reaction chamber in Ar/N2 pulse-modulated induction thermal plasmas
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