A novel 2 × 2 MEMS optical switch using the split cross-bar design

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Bibliographische Detailangaben
Veröffentlicht in:	Journal of micromechanics and microengineering 2007-05, Vol.17 (5), p.875-882
Hauptverfasser:	Yang, Yao-Joe, Liao, Bo-Ting, Kuo, Wen-Cheng
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Circuit properties Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Integrated optics. Optical fibers and wave guides Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Microelectronic fabrication (materials and surfaces technology) Micromechanical devices and systems Optical and optoelectronic circuits Physics Precision engineering, watch making Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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