Stress measurement in a cantilevered silicon beam undergoing coupled motion of torsion and bending
In this article we derive an analytical mathematical model for a micromachined silicon tuning-fork gyroscope which responds to an external angular rate by a rotation about its sensitive axis. The mechanical stress caused by the sense motion is detected with a piezoresistive read-out structure. Based...
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Veröffentlicht in: | Smart materials and structures 2007-04, Vol.16 (2), p.296-304 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | In this article we derive an analytical mathematical model for a micromachined silicon tuning-fork gyroscope which responds to an external angular rate by a rotation about its sensitive axis. The mechanical stress caused by the sense motion is detected with a piezoresistive read-out structure. Based on the mathematical model of a cantilevered beam with cubic crystal structure undergoing a coupled motion of bending and torsion, steady-state solutions for the mechanical stress components within the piezoresistive read-out structure are provided. The analytical results are compared with finite-element simulations and experimentally verified for a certain design of the read-out structure sensitive to shear stress. Providing fully analytical solutions of the mechanical stress distributions, this paper establishes a basis for optimizing the design of the read-out structure as well as its position and orientation of the angular rate sensor for maximum sensitivity. |
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ISSN: | 0964-1726 1361-665X |
DOI: | 10.1088/0964-1726/16/2/007 |