Quasi-planar high-Q millimeter-wave resonators
Several low-profile 250-mum-high Ka-band cavity resonators are demonstrated with resonant frequencies near 26 GHz and unloaded quality (Q) factors greater than 400. The air-filled copper cavity resonators are fabricated on a silicon substrate using a photolithographic process. A microrectangular coa...
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| Veröffentlicht in: | IEEE transactions on microwave theory and techniques 2006-06, Vol.54 (6), p.2439-2446 |
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| container_end_page | 2446 |
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| container_issue | 6 |
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| container_title | IEEE transactions on microwave theory and techniques |
| container_volume | 54 |
| creator | Vanhille, K.J. Fontaine, D.L. Nichols, C. Filipovic, D.S. Popovic, Z. |
| description | Several low-profile 250-mum-high Ka-band cavity resonators are demonstrated with resonant frequencies near 26 GHz and unloaded quality (Q) factors greater than 400. The air-filled copper cavity resonators are fabricated on a silicon substrate using a photolithographic process. A microrectangular coaxial transmission-line feed is integrated in the same process. Four resonators with different mechanical support structures are demonstrated. The resonators are designed using the finite-element method and simulation of both the resonant frequency and Q factor agree well with measurements |
| doi_str_mv | 10.1109/TMTT.2006.875794 |
| format | Article |
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The air-filled copper cavity resonators are fabricated on a silicon substrate using a photolithographic process. A microrectangular coaxial transmission-line feed is integrated in the same process. Four resonators with different mechanical support structures are demonstrated. The resonators are designed using the finite-element method and simulation of both the resonant frequency and Q factor agree well with measurements</description><identifier>ISSN: 0018-9480</identifier><identifier>EISSN: 1557-9670</identifier><identifier>DOI: 10.1109/TMTT.2006.875794</identifier><identifier>CODEN: IETMAB</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Applied sciences ; Cavity resonator ; Cavity resonators ; Circuit properties ; Coaxial components ; coaxial transmission line ; Copper ; Electric, optical and optoelectronic circuits ; Electronic circuits ; Electronics ; Exact sciences and technology ; Feeds ; Finite element methods ; Mathematical analysis ; Microelectronic fabrication (materials and surfaces technology) ; Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits ; Microwaves ; Millimeter wave technology ; Oscillators, resonators, synthetizers ; Photolithography ; Q factor ; Q factors ; quality ; Resonant frequencies ; Resonant frequency ; Resonators ; Semiconductor electronics. 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The air-filled copper cavity resonators are fabricated on a silicon substrate using a photolithographic process. A microrectangular coaxial transmission-line feed is integrated in the same process. Four resonators with different mechanical support structures are demonstrated. The resonators are designed using the finite-element method and simulation of both the resonant frequency and Q factor agree well with measurements</description><subject>Applied sciences</subject><subject>Cavity resonator</subject><subject>Cavity resonators</subject><subject>Circuit properties</subject><subject>Coaxial components</subject><subject>coaxial transmission line</subject><subject>Copper</subject><subject>Electric, optical and optoelectronic circuits</subject><subject>Electronic circuits</subject><subject>Electronics</subject><subject>Exact sciences and technology</subject><subject>Feeds</subject><subject>Finite element methods</subject><subject>Mathematical analysis</subject><subject>Microelectronic fabrication (materials and surfaces technology)</subject><subject>Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits</subject><subject>Microwaves</subject><subject>Millimeter wave technology</subject><subject>Oscillators, resonators, synthetizers</subject><subject>Photolithography</subject><subject>Q factor</subject><subject>Q factors</subject><subject>quality</subject><subject>Resonant frequencies</subject><subject>Resonant frequency</subject><subject>Resonators</subject><subject>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</subject><subject>Silicon</subject><subject>Silicon substrates</subject><subject>Transmission lines</subject><issn>0018-9480</issn><issn>1557-9670</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2006</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNp9kEtLAzEQgIMoWKt3wUsR1NOuk02ySY5SfEFFCus5xDSxW_ZRk13Ff2-WLRQ8eBqG-eb1IXSOIcUY5G3xUhRpBpCngjMu6QGaYMZ4InMOh2gCgEUiqYBjdBLCJqaUgZigdNnrUCbbSjfaz9blxzpZzuqyqsradtYn3_rLzrwNbaO71odTdOR0FezZLk7R28N9MX9KFq-Pz_O7RWKIIF3iMpcTBtIwFjdJyS3VhoDQNGcUm3dw0rqVJNYKvoIVMMiMgQxT4QSwTJIpuhnnbn372dvQqboMxlbxTNv2QQkhKfCM8khe_0tmAuc0JziCl3_ATdv7Jn6hRLwq4xJIhGCEjG9D8NaprS9r7X8UBjV4VoNnNXhWo-fYcrWbq4PRlfO6MWXY93EZVdPhpYuRK621-3JOCeOY_AIl1IOP</recordid><startdate>20060601</startdate><enddate>20060601</enddate><creator>Vanhille, K.J.</creator><creator>Fontaine, D.L.</creator><creator>Nichols, C.</creator><creator>Filipovic, D.S.</creator><creator>Popovic, Z.</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><general>The Institute of Electrical and Electronics Engineers, Inc. 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Microelectronics. Optoelectronics. Solid state devices</topic><topic>Silicon</topic><topic>Silicon substrates</topic><topic>Transmission lines</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Vanhille, K.J.</creatorcontrib><creatorcontrib>Fontaine, D.L.</creatorcontrib><creatorcontrib>Nichols, C.</creatorcontrib><creatorcontrib>Filipovic, D.S.</creatorcontrib><creatorcontrib>Popovic, Z.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE/IET Electronic Library (IEL)</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>METADEX</collection><collection>Materials Research Database</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>Engineering Research Database</collection><jtitle>IEEE transactions on microwave theory and techniques</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Vanhille, K.J.</au><au>Fontaine, D.L.</au><au>Nichols, C.</au><au>Filipovic, D.S.</au><au>Popovic, Z.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Quasi-planar high-Q millimeter-wave resonators</atitle><jtitle>IEEE transactions on microwave theory and techniques</jtitle><stitle>TMTT</stitle><date>2006-06-01</date><risdate>2006</risdate><volume>54</volume><issue>6</issue><spage>2439</spage><epage>2446</epage><pages>2439-2446</pages><issn>0018-9480</issn><eissn>1557-9670</eissn><coden>IETMAB</coden><abstract>Several low-profile 250-mum-high Ka-band cavity resonators are demonstrated with resonant frequencies near 26 GHz and unloaded quality (Q) factors greater than 400. The air-filled copper cavity resonators are fabricated on a silicon substrate using a photolithographic process. A microrectangular coaxial transmission-line feed is integrated in the same process. Four resonators with different mechanical support structures are demonstrated. The resonators are designed using the finite-element method and simulation of both the resonant frequency and Q factor agree well with measurements</abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/TMTT.2006.875794</doi><tpages>8</tpages></addata></record> |
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| ispartof | IEEE transactions on microwave theory and techniques, 2006-06, Vol.54 (6), p.2439-2446 |
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| subjects | Applied sciences Cavity resonator Cavity resonators Circuit properties Coaxial components coaxial transmission line Copper Electric, optical and optoelectronic circuits Electronic circuits Electronics Exact sciences and technology Feeds Finite element methods Mathematical analysis Microelectronic fabrication (materials and surfaces technology) Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits Microwaves Millimeter wave technology Oscillators, resonators, synthetizers Photolithography Q factor Q factors quality Resonant frequencies Resonant frequency Resonators Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Silicon Silicon substrates Transmission lines |
| title | Quasi-planar high-Q millimeter-wave resonators |
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