A robust alternative for the DRAM capacitor of 50nm generation

Bibliographische Detailangaben

Hauptverfasser:	KWANG HEE LEE, CHUNG, Suk-Jin, HAN, Sungho, JANG, Soolk, NAM, Byeong-Yun, YOO, Cha-Young, KIM, Sung-Tae, CHUNG, U-In, MOON, Joo-Tae, RVU, Byune-Il, JIN YONG KIM, KIM, Ki-Chul, LIM, Jae-Soon, CHO, Kyuho, LEE, Jinil, CHUNG, Jeong-Hee, HANJIN LIM, CHOI, Kyungin
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Applied sciences Design. Technologies. Operation analysis. Testing Dielectric, amorphous and glass solid devices Electronics Exact sciences and technology Integrated circuits Integrated circuits by function (including memories and processors) Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online-Zugang:	Volltext
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