Fabrication of a 2.5 Gbps × 4 channel optical micro-module for O-PCB application
We report on the fabrication of a polymer-based 2.5 Gbps × 4 channel optical interconnecting micro-module for optical printed circuit board (O-PCB) application. An optical waveguide array is used for optical transmission from vertical surface emitting laser (VCSEL) array to photodiode (PD) array and...
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Veröffentlicht in: | Microelectronic engineering 2006-04, Vol.83 (4), p.1347-1351 |
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Hauptverfasser: | , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | We report on the fabrication of a polymer-based 2.5
Gbps
×
4 channel optical interconnecting micro-module for optical printed circuit board (O-PCB) application. An optical waveguide array is used for optical transmission from vertical surface emitting laser (VCSEL) array to photodiode (PD) array and the built-in 45° waveguide mirrors are used for vertical coupling. The optical waveguide array and the 45° mirrors are fabricated by UV imprint process in one-step. We fabricate microlensed VCSELs by micro-inkjetting method, which reduced radiation angle of VCSEL from 18° to 15° for better light coupling. We use solder ball array and pin array for alignment between O-PCB and the electrical sub-boards with alignment mismatch below 10
μm in
x,
y and
z axis. The fabricated optical interconnection module transmits data at the rate of 2.5
Gbps per channel. |
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ISSN: | 0167-9317 1873-5568 |
DOI: | 10.1016/j.mee.2006.01.118 |