Electron release in the afterglow of a pulsed inductively-coupled radiofrequency oxygen plasma

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	Plasma sources science & technology 2006-05, Vol.15 (2), p.171-177
Hauptverfasser:	Brockhaus, A, Leu, G F, Selenin, V, Tarnev, Kh, Engemann, J
Format:	Artikel
Sprache:	eng
Schlagworte:	Discharges for spectral sources (including inductively coupled plasma) Discharges for spectral sources (including inductively coupled plasmas) Electric discharges Exact sciences and technology Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma diagnostic techniques and instrumentation Radio-frequency and microwave measurements
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!